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Cool Cooling Collar for Bake-Out of Temperature-Sensitive Devices

Jonas D. FortmannChristian BrandMichael Horn-von Hoegen
Nov 2023
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摘要原文
A combination of a pumpable gate valve and a self-built cooling collar permits bake-out of an ultra-high vacuum chamber without having to dismount sensitive equipment. A small pump port on the closed gate valve maintains ultra-high vacuum conditions for a TVIPS TemCam-XF416 imaging electron detector in the case of venting the main chamber. The water-cooled collar mounted to the detector housing prevents heating of the detector upon bake-out of the ultra-high vacuum chamber.
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