Scalable Atomic Arrays for Spin-Based Quantum Computers in Silicon
Alexander M. Jakob (1)Simon G. Robson (1)Hannes R. Firgau (2)Vincent Mourik (2)Vivien Schmitt (2)Danielle Holmes (2)Matthias Posselt (3)Edwin L.H. Mayes (4)Daniel Spemann (5)Andrea Morello (2)David N. Jamieson (1) ((1) CQC2TSchool of PhysicsThe University of MelbourneAustralia(2) CQC2T
Alexander M. Jakob (1)Simon G. Robson (1)Hannes R. Firgau (2)
...+22
Germany)
Sep 2023
0被引用
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摘要原文
Semiconductor spin qubits combine excellent quantum performance with the prospect of manufacturing quantum devices using industry-standard metal-oxide-semiconductor (MOS) processes. This applies also to ion-implanted donor spins, which further afford exceptional coherence times and large Hilbert space dimension in their nuclear spin. Here we demonstrate and integrate multiple strategies to manufacture scale-up donor-based quantum computers. We use $^{31}$PF$_{2}$ molecule implants to triple the placement certainty compared to $^{31}$P ions, while attaining 99.99$\,$% confidence in detecting the implant. Similar confidence is retained by implanting heavier atoms such as $^{123}$Sb and $^{209}$Bi, which represent high-dimensional qudits for quantum information processing, while Sb$_2$ molecules enable deterministic formation of closely-spaced qudits. We demonstrate the deterministic formation of regular arrays of donor atoms with 300$\,$nm spacing, using step-and-repeat implantation through a nano aperture. These methods cover the full gamut of technological requirements for the construction of donor-based quantum computers in silicon.
