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DOI: 10.1063/5.0124816

A Joint Calibration Technique for Improving Measurement Accuracy of Voltage and Current Probes During Synchronous Operation for RF Based Plasma Devices

MahreenA. GanguliVeda Prakash GajulaSatyananda KarDebaprasad Sahu
Dec 2022
摘要
This paper presents a joint calibration scheme for voltage (V) and current(I) probes that helps resolve accurately voltage-current phase differences evenwhen the difference is very close to $90^{\circ}$. The latter has been a majorissue with V-I probes when used with miniature RF plasma devices like theatmospheric pressure plasma jet (APPJ). Since the impedance of such miniaturedevices is predominantly capacitive, the phase difference between the voltageand current signals is very nearly $90^{\circ}$. It turns out, however, thatwhen V-I probes are used with such devices without joint calibration, thesefrequently yield phase shifts over $90^{\circ}$. Also, since power absorptionis proportional to the resistive part of the impedance it becomes verysensitive to the phase difference when it is close to $\approx90^{\circ}$.Thus, it is important to be able to resolve the phases accurately.Post-calibration, V-I probes would be indispensable for the electricalcharacterization of APPJs for determining average RF power $P_{av}$, plasmaimpedance $Z_p$, etc.Typical post-calibration V-I data yields, $Zp \approx 93.6- j 1139 {\Omega} (81.5 - j 1173 {\Omega})$ at $P_{av} \approx 9.8 W$$(\approx7.7 W)$ for helium (argon) gas.
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