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Synchronization in pairs of opto-thermally driven mechanically coupled micro-oscillators

Aditya BhaskarMark WalthRichard H. RandAlan T. Zehnder
Jul 2022
摘要
We study the phenomenon of synchronization in pairs of doubly clamped,mechanically coupled silicon micro-oscillators. A continuous-wave laser beam isused to drive the micro-beams into limit cycle oscillations and to detect theoscillations using interferometry. Devices of different dimensions are used tointroduce frequency detuning, and short silicon bridges connecting themicro-beams are used as mechanical coupling between the oscillators. The regionof synchronization is plotted for the MEMS system in the detuning vs. couplingparameter space and compared with the numerical analysis of a corresponding,lumped-parameter model. Three states of oscillations are observed i.e. thedrift state, quasi-periodic state, and the synchronized state. The numericalmodel also distinguishes between in-phase and out-of-phase synchronizationwhere out-of-phase synchronization is observed at low coupling strengths andlow frequency detuning. We also show that the experimentally measured frequencyfluctuations of the system reduce with an increase in coupling strength.
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